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Test Wafers

    
Analysis Software

    
Metrology Service

    Defect Characterization
    & E-Testing Services

 


 

 



Measurement Plans

 Dielectric Wafers

Wafer
Type
Thickness Profile Details
Manual Mid Quality High Quality
SKW1
SKW1-1
  3 or 5 Dies
5 Up/5 Down Sites
  2 Dies
2 Sites
contact SKW
SKW7 3 or 5 Dies
3 Up/3 Down
Sites
3 or 5 Dies
8 Up/8 Down
Sites
3 or 5 Dies
22 Up/22 Down Sites
2 Dies
4 Sites
more...
SKW7-2 3
3 Up/3 Down
Sites
5 Dies
9 Up/8 Down
Sites
5 Dies
22 Up/22 Down Sites
2 Dies
4 Sites
more...
SKW7-3
(300mm)
 

9 Dies
8 Up/8 Down Sites

9 Dies
22 Up/22 Down Sites
9 Dies
2 Sites
contact SKW

Notes :
1. To calculate Planarization Length, at least mid-quality plan is required.

 STI Wafer
Wafer
Type
Thickness Profile Details
Manual Mid Quality High Quality
SKW 3 3 Dies
6 Up/6 Down Sites
5 Dies
8 Up/7 Down Sites
5 Dies
24 Up/24 Down Sites
5 Dies
6 Sites
more...

 Tungsten Wafers

Wafer
Type
Manual Mid Quality High Quality Details
Optical Profile Optical Profile Optical Profile
SKW 5             contact SKW
SKW 5-3

1 Sites

7 Scans
9 Sites 14 Scans 9 Sites 23 Scans more...
on 1 or 3 Dies on 3 or 5 Dies on 3 or 5 Dies
 Copper Wafer
Wafer
Type
Manual
Mid Quality
High Quality
Details
Optical
Profile
Optical
Profile
Optical
Profile
SKW 6-3

1 Sites

7 Scans
9 Sites
15 Scans
9 Sites
23 Scans
on 1 or 3 Dies
on 3 or 5 Dies
on 3 or 5 Dies
 
 

SKW Associates, Inc.