Products & Services


    
Test Wafers

    
Analysis Software

    
Metrology Service

    Defect Characterization
    & E-Testing Services

 


 

 



SKW 5-3 Metrology Guideline
General Guideline for Measurement Sites
Sample Plans
There are several different sampling plans to effectively characterize the CMP process at hand with varying degrees of quality and efficiency.

Generally, we recommend that first sampling plan (manual plan) with one die to any customer who performs the measurements manually.

For those using automated tools with pattern recognition capability, we recommend the second sampling plan (efficient plan). We have found that this plan provides the best trade-off between quality and efficiency (time and cost) to our customers.

The high quality plan is largely for those interested in very detailed analysis including modeling work.
Manual Measurement Plan - 1 Optical Measurements and 7 Scans on 1 or 3Dies
Automated Efficient Plan
- 9 Optical Measurements and 14 Scans on 3 or 5 Dies
Automated High Quality Plan
- 9 Optical Measurements and 23 Scans on 3 or 5 Dies

Since there are many features to measure for this plan, it is highly recommended that an automated measurement tool be used. In addition, take care to note the limitations of the tool being used, e.g. the tip size of a profilometer.

Manual Measurement Sampling Plan sample plan list
X : Optical measurement site
- : Profiler scan
Automated Efficient Measurement Sampling Plan sample plan list

X : Optical measurement site
- : Profiler scan
Locations for Optical Measurements
Site # X (um) Y (um)
1 50 50
2 10000 50
3 19950 50
4 50 10000
5 10000 10000
6 19950 10000
7 50 19950
8 10000 19950
9 19950 19950
* X, Y coordinates are relavant to lower left corner of each die.
* Site numbers proceed from left to right and down to up sturctures.
Automated High Quality Measurement Sampling Plan sample plan list

Locations of optical measurements are identical with those of Efficient Sampling Plan. Go to location table

 
 

SKW Associates, Inc.